TS300-SE Probe System

MPI TS300-ShielDEnvironment ™ The TS300-SE 12 inch probe station is designed to provide advanced EMI/RFI/opaque shielding, ultra-low noise, and low leakage measurement capabilities for small devices on 300mm wafers and below. It is combined with the shock-absorbing platform at the optimal height, making daily operations very convenient.

Suitable for various wafer measurement applications

• Such as component characteristic description and modeling, RF and millimeter wave, wafer level reliability (WLR), and failure analysis (FA)
• MPI ShielDEnvironment ™ Shielding environment
• A precision measurement environment designed specifically for EMI/RFI/Light Time shielding
• Support low leakage measurement at the aviation safety level
• Built in shock absorption system
• Temperature measurement range -60 ° C to 300 ° C

ShielDEnvironment ™

MPI ShielDEnvironment ™ It is a high-performance micro dark room shielding system that provides ultra-low noise, low capacitance measurement, excellent EMI and opaque testing environment.

ShielDCap ™

MPI ShielDEnvironment ™ The micro dark room shielding system provides up to 4 ports of RF or up to 8 ports of DC/Kelvin and other combinations for testing.

MPI ShielDCap ™ Easy to block and reconfigure, it plays an important role in simplifying daily operations.

air bearing

MPI's unique air cushion stage design features a simple one handed calibrator control, providing unparalleled operational convenience for fast XY navigation and wafer loading, while also having a precise 25x25mm XY Theta micrometer movement that does not affect precise positioning capabilities.

Unique chuck Z adjustment

In addition to the air bearing XY worktable, the TS300-SE also includes a 5mm Z-suction cup adjustment (μ m resolution), which can achieve precise contact/overtravel control or probe card drop tip correction.

The 1mm scale indicator provides convenient feedback for the operator, and the 20mm pneumatic lift offers a portable one click lifting program.

Multiple chuck options

TS300-SE offers a variety of chuck options to meet different budget and application requirements.

MPI and ERS jointly designed a new 300mm hot card tray AirCool ® The PRIME technology series provides unparalleled thermal elasticity, reducing temperature control time by 60%, while also offering the largest thermal range on the market.

Reduce conversion time, improve electrical performance, make testing easier in inert gas environments, and have on-site upgradability with AirCool ® The added value of PRIME hot card disk system.

There are several types of chucks available: coaxial, three-axis or RF, high voltage, etc., with two auxiliary ceramic chucks for precise and stable calibration.

Temperature control integration

The wafer loading door can be locked at any temperature below 15 ° C, making the TS300-SE the safest manual probe station on the market.

In addition, the temperature control system can be operated through an integrated touch screen, which is installed in a convenient location on the detector according to ergonomic principles to achieve quick adjustment and instant feedback.

ERS' unique AC3 cooling technology

The probe station systems under MPI adopt ERS' unique AC3 cooling technology and its air management system, which can directly remove MPI ShielDE environment from the "used" air ™， Compared to other systems on the market, it can reduce dry air consumption by up to 30% to 50%.

Multiple optical options

MPI optical components can be selected as single tube microscope MPI SuperZoom ™ SZ10， MegaZoom with up to 12x optical zoom ™ MZ12 or EeyZoom with a working distance exceeding 42mm ™ EZ10- It features a 10x optical zoom system with an ergonomic 20x eyepiece, a 90mm working distance, and optical resolution as low as 2um or less.